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1 | Khatello e phahameng ea ho sebetsa 20.6 Mpa. |
2 | Max.mocheso o sebetsang 204 ℃ (tikoloho e phahameng ea mocheso ho fihlela ho 454 ℃, ka nako ena thepa ea ho tiisa e nkeloa sebaka ke graphite e atolositsoeng) |
3 | Sistimi ea filthara Litšilafalo tse itseng, likhase, lino li sebetsa. |
4 | Stainless tšepe phofo metallurgy sintered filthara ho nepahala 2μm ~ 40μm |
5 | Sefa phallo 1x 10 -6 ~ 1 × 10-2L / min.cm2.pa |
6 | Sefe se ka fetoloa. |
Likarolo tsa Sehlahisoa tsa Sefe
1 | Mefuta e mengata ea lisebelisoa, phallo e tloha ho 15 ho isa ho 300SL / min. |
2 | E lumellana hantle le likhase tse ngata tse phahameng tsa semiconductor process. |
3 | 3 nanoparticle filtration capacity e boloka ts'ebetso e phahameng ea phallo le ho theoha ha khatello e nyane haholo. |
4 | 5Ra electropolished holim'a ka thibela tšilafalo ka hare. |
5 | Bake ka naetrojene e chesang ka mor'a metsi a hloekisitsoeng ho finyella litekanyetso tsa ts'ebetso ea semiconductor. |
6 | 1000 level e se nang lerōle workshop ea aseptic, ho hloekisa le ho paka tikoloho. |
7 | Teko bakeng sa 100% ea ho lutla ha helium. |
Inlet | Sethala | |
1 | 1/8 ″ ho kenya tube | 1/8 ″ ho kenya tube |
2 | 1/4 ″ ho kenya tube | 1/4 ″ ho kenya tube |
3 | 3/8 ″ ho kenya tube | 3/8 ″ ho kenya tube |
4 | 1/2 ″ ho kenya tube | 1/2 ″ ho kenya tube |
5 | 6MM ho kenya tube | 6MM ho kenya tube |
6 | 8MM ho kenya tube | 8MM ho kenya tube |
7 | 10MM ho kenya tube | 10MM ho kenya tube |
8 | 12MM ho kenya tube | 12MM ho kenya tube |
9 | 1/8″ NPT ea Basali | 1/8″ NPT ea Basali |
10 | 1/4″ NPT ea Basali | 1/4″ NPT ea Basali |
11 | 1/4″ NPT ea banna | 1/4″ NPT ea banna |
12 | 3/8″ NPT ea banna | 3/8″ NPT ea banna |
13 | 1/2″ NPT ea banna | 1/2″ NPT ea banna |
Mekhahlelo ea Ts'ebetso ea Sehlahisoa ea Sesefa
1 | Ho Sefa ho Nepaha | ≥0.0025μm | |
2 | Bokhoni ba ho sefa | Sekhahla sa ho tlosa99.99999%≥0.0025μm | |
3 | Phallo e lekantsoeng | 15L/Metsotso | |
4 | 60L/Metsotso | ||
5 | 120L/Metsotso | ||
6 | 200L/Metsotso | ||
7 | 300L/Metsotso | ||
8 | Sebopeho sa sefe | setho sa sefe | 316L/PTFE |
9 | matlo | tšepe e sa hloekang 316L | |
10 | Maemo a mosebetsi | Khatello e kholo ea ho kena | 21Mpa (310kgf/cm2) |
11 | Khatello e phahameng ea phapang | 15Mpa (153kgf/cm2) | |
12 | Boholo ba mocheso oa ho sebetsa | 430 ℃ (khase ea inert) | |
13 | Sekhahla sa ho lutla ha Helium | 1×10-9 atm.cc/sec | |
14 | Qetello ea bokaholimo | ≤Ra 5μin |