Ts'ebeliso ea likhase tse indasteri ea semiconductor li qala ho khutlela mathoasong a bo-1950 ho isa ho bo-1960. Nakong ea ts'ebetso ea semiconductor, likhase li sebelisoa haholo ho hloekisa le ho sireletsa semionductor lisebelisoa tsa semiconductor ho netefatsa bohloeki ba bona le boleng. Har'a likhase tse sebelisoang haholo ho sebelisoa ke naetrojene ebile ke hydrogen.
Joalokaha semiconducctor theknoloji e tsoetseng pele le lits'ebetso tsa thepa li ile tsa tsoela pele ho ntlafatsa, tlhoko ea likhase e ile ea eketseha. Ka 1970, ho nts'etsopele ha Seikinductor ea ho etsa likhahla tsa bohlokoa joalo ka litlaleho le likhase tse tšesaane tse ileng tsa eketseha butle-butle, 'me li-gust tsa sf6) le li-oksijene li ile tsa sebelisoa hangata le likhase tse ngata. 1980 o ile a bona keketseho e 'ngoe ea tlhokahalo ea tlhoko ea likhase ka nts'etsopele ea lipotoloho tse kopaneng le keketseho ea bona. Hydrojene e ne e sebelisoa haholo molemong oa ho etsa lintho, ho kenyeletsoa hydrogen annaing annaing annaling le hydrogen vapor Ho tloha ka 1990 ho ea ho ba 1990 ho ea ho ba 1990, tlhoko ea likhase tse tebileng le likhase tse tobileng e ntse e eketseha ha li-semicondtor tsa sesebelisoa li ntse li tsoela pele ho nyenyefatsa le lits'ebetso tse ncha li hlahisitsoe. Mohlala, ts'ebeliso ea Extraviolet, EUV) e hloka tšebeliso ea likhase tsa bohloeki bo phahameng haholo joalo ka naetrojene ebile ke hydrogen.
Kahoo khase ea semiconductor e tsoela pele ho eketseha le lihlahisoa tse amanang le khase, li-casection tsa khase, li-vis tsa peterole, le likarolo tsa tsona li tjena:
Khatello ea Baphatlalatsi: Baphaphathehi ba khatello ke lisebelisoa tse sebelisetsoang ho laola khatello ea khase. Hangata ba na le bothata ba ho rarahane le sensor ea khatello. Khatello ea khatello ea khatello ea khatello ea khase e kenya letsoho le ho tsitsisa khatello ea khase ea tlhahiso ka ho fetola valve ho fihlela litlhoko tse ikhethileng tsa kopo. Litsebi tsa khatello li sebelisoa hohle libakeng tse kang indasteri, indasteri le li-laeboratori hammoho le indasteri ea semiconductor.
Li-valves tsa khase: li-valeve tsa khase li sebelisoa ho laola phallo ea likhase le ho koala litemana tsa khase. Hangata li na le ts'ebetso ea ho / e sephara e otlang kapa e koala phallo ea khase. Ho na le mefuta e fapaneng ea li-valves tsa khase, ho kenyelletsa li-valves tsa mananeo, lisebelisoa tsa motlakase le li-valves tsa pneumate. Li sebelisoa haholo ka litsamaiso tsa khase ho laola phallo, khatello le sekhahla sa likhase.
Lits'oants'o tsa Khatello ea Khase: Likhatello tsa khatello tsa khase li sebelisetsoa ho lekanya boemo ba khase. Hangata li kentsoe libakeng tse tebileng ka litsamaiso tsa khase ho beha khatello ea khatello le ho netefatsa hore li maemong a sireletsehileng. Likhatello tsa khatello tsa khase li sebelisoa hohle indastering, ho etsa thepa le li-laboratori, indasteri ea sekhachane le eona e ameha.
Lits'inyeho tsa khase li sebelisoa ho bona litsamaiso tsa khase li tsoala ka litsamaiso tsa khase. Ba lemohaHo ba teng ha khase ho tsoa le ho nolofatsa motho eo nako e tlang ka nako e tlang ho thibela likotsi tsa ho sesa. Lintoa tsa khase ha li sebelisoe hohle tsa indasteri, lik'hemik'hale le khase, indasteri ea semiconductor le eona e ameha.
Poso: Hlakubele 20-20244