Theknoloji ea litheko e phahameng ea poping ea khase e kholo ke karolo ea phepelo ea khase e phahameng, e leng theknoloji ea bohlokoa ea ho lopolla khase e hlokahalang mme ho ntse ho boloka boleng bo tšoanelehang; Theknoloji ea khase ea Purity-puri e kenyelletsa moralo o nepahetseng oa sistimi le lisebelisoa, kaho, kaho, kaho, le ho kenya le ho kenya tlhahlobo le tlhahlobo. Lilemong tsa morao tjena, litlhokahalo tse ntseng li tiisa litšusumetso tsa likhase tse hloekileng tsa likhase tse hloekileng li entse hore theknoloji ea likhase tse phahameng e tšoenyehile le ho hatisoa. Tse latelang ke kakaretso e khuts'oane ea top ea khase e phahameng ho tsoa ho khetho ea lintho tse bonahalangof kaho, hammoho le ho amoheloa ke letsatsi le letsatsi.
Mefuta ea likhase tse tloaelehileng
Khetho ea likhase tse tloaelehileng ho indasteri ea elektroniki:
Likhase tse tloaelehileng(Khase ea Bulk): hydrogen (h2), naetrojene (n2), oksijene (o2), Argon (a2), jj.
Likhase tse ikhethangke Sih4 ,PH3 ,B2H6 ,A8H3 ,CL ,Hcl,CF4 ,NH3,Pocc3, Sihfccl2 Sihcl3,NH3, BCL3 ,Sif4 ,CFF3 ,CO,C2F6, N2O,F2,Hf,Hb sf6...... jj.
Mefuta ea likhase tse khethehileng ka kakaretso e ka khethoa e le sethalakhase, chefokhase, e tukangkhase, e ka bakakhase, ka ho nertkhase, joalo-joalo. Hangata likhase tse tloaelehileng tsa semiconductor li khethoa ka tsela e latelang.
(i) Corrosive / chefokhase: Hcl, bf3, Wf6, HBR, Sih2Cl2, NH3, PH3, CL2, BCL3... joalo-joalo.
(ii) Setsikhase: H2, Ch4, Sih4, PH3, Ash3, Sih2Cl2, B2H6, Ch2f2,Ch3F, co ...
(iii)khase: O2, CL2, N2O, nf3... jj.
(iv) anertkhase: N2, Cf4, C2F6, C4F8,Sf6, Co2, Ne, Hell, he ... joalo-joalo.
Likhase tse ngata tsa seniconductor li kotsi ho 'mele oa motho. Ka ho khetheha, tse ling tsa likhase tsena, tse kang Sih4 Taba ea bohlokoa e itlhahelang feela, ha feela mosjeko o tla etsa hore a be le oksijene moeeng ebe o qala ho chesa; le molora3Ho lutla haholo, ho lutla hanyane ka hanyane ho ka baka kotsi ea bophelo ba motho, ke likotsi tse sa pheleng, kahoo litlhoko tsa polokeho ea tsamaiso ea sistimi e phahame haholo.
Boholo ba kopo ea likhase
E le thepa ea bohlokoa ea indasteri ea sejoale-joale, lihlahisoa tsa khase li sebelisoa haholo, le likhase tse tloaelehileng, li-censtroniki, li-canrole Tšebeliso ea khase e na le tšusumetso ea litsebi tsa mahlale a maholohali ea masimo ana haholo, 'me lisebelisoa tsa eona tse sa utloahaleng tsa tabo li khasetsoa kapa ha li khase khase. Ke litlhoko le litlhoko tsa litheolelo tse ngata tsa indasteri le mahlale a sejoale-joale tsa mahlale le mahlale a indasteri ea khase a ka hlahisoa ke ho tlosoa le meeli, boleng le bongata.
Ts'ebetso ea khase ka li-microlectics le indasteri ea semicondtor
Ts'ebeliso ea khase e lula e bapala karolo ea bohlokoa mabapi le ts'ebetso ea semiconductor e sebelisoa haholo indasteri ea semiso-mochole e bitsoang semiconductor ea hona joale e le mokhoa oa ho etsa lihlahisoa. Ho hloeka ha khase ho na le tšusumetso e tiileng ts'ebetsong ea likarolo le tlhahiso ea lihlahisoa, le polokeho ea phepelo ea khase e amana le bophelo ba mesebetsi ea lijalo.
Bohlokoa ba ho itlhoekisa ka ho fetisisa ho lijalo tsa khase tse phahameng haholo
Mohato oa tšepe o qhibilihang le ho etsa boitsebiso, ka kakaretso ea khase e ka kenella ka kotloloho. Kamora ho sebetsa ha tšepe e se nang letsoai, eseng feela bokahohle ba batšoaruoa ba arohaneng, empa le ka litebele tsa eona tsa tšepe le tsona li ne li amohela boholo ba khase e itseng. Ha ho na le moea o futhumala, tšepe e amohela karolo ena ea khase e tla boela e kenye moea o futhumetseng. Ha moea oa moea o le mothapo o tlase, moitlami a pheta khase ea khatello, 'me khase e emisitsoeng ke khase e bakang khase e hloekileng tube le emeng. Ka nako e ts'oanang, boemeli le qeto ba phetoa, e le hore tšepe e ka hare ho eona e hlahisa phofo ea tšepe, 'me likarolo tsena tsa lerōle le tsona li silafatsa khase e hloekileng ka har'a tube. Tšobotsi ena ea tube e bohlokoa ho netefatsa ho hloeka ha khase e tsamaisoang, e sa hlokeng ho hanyetsa ka holimo ho lerabeng.
Ha khase e nang le ts'ebetso e matla e sebelisoang e sebelisoa, lipeipi tse thibelang li-cratel tse hatisitsoeng li lokela ho sebelisoa bakeng sa ho phatloha. Ho seng joalo, phala e tla hlahisa melapo ea Corroon sebakeng se tebileng ka lebaka la keho e tebileng.
Khokahano ea bohloeki bo phahameng le bo hloekileng ba khase
Molao-motheong oo kaofela o feretsoe, 'me li-tubes tse sebelisoang ho se na phetoho ka mokhatlong ha ho holofaloa ho sebelisoa. Lisebelisoa tse nang le li-carbon tse phahameng haholo li tlasa moea o hlōlang ka hare ho kopa, o etsang ho kenella ha khase, o senyang bohloeki ba liteko tsohle tsa rona.
Ka kakaretso, bakeng sa khase ea phepelo e phahameng le e khethehileng ea khase, ho hlokahala hore ho sebelisoe ka har'a papiso e phahameng ea tšepe.
Mohopolo o akaretsang oa theknoloji e hloekileng bakeng sa phetiso le lipeipi tsa kabo
Ho theha phetisetso ea 'mele e hloekileng le e hloekileng ea khase e nang le peiping ho bolela hore ho na le litlhoko tse itseng kapa li laola likarolo tse tharo tsa khase ho tsamaisoa.
Pure ea gase: Litaba tsa moea li hloekile ho bohloeki ba GGA: Litaba tsa ho se be le maemo a litšila, hangata li hlahisoang e le liperesente tsa prity, PPB, PPT.
Ho omella: palo ea mongobo oa traces khase, kapa palo e bitsoang ho whost, hangata e hlahisoang mabapi le methapo, joalo ka khatello ea khatello ea sepakapaka, joalo ka khatello ea khatello ea sepakapaka. C.
Bohloeki: Palo ea likaroloana tsa khase, boholo ba μm, hangata li bontša ho ba le moea o mongata / m3 ea li-c3 tsa batho ba bangata hakae.
Ts'ebetso ea boholo bo silang, ha e bua ka pomporo, apara phokotso e hlahisoang ke marotholi a tšepe, ebang, ho latela boholo ba boholo ba karohano ea eona e arotsoe
a) likaroloana tse kholo - boholo bo kaholimo ho 5μm
b) karoloana - bophara ba boholo ba thepa pakeng tsa 0,1μμm
c) Ts'ebetso ea Ultra-Micro ea Ultra - boholo ba karolo e ka tlase ho 0.1μm.
Bakeng sa ho ntlafatsa ts'ebeliso ea theknoloji ena, ho khona ho utloisisa kutloisiso ea boholo ba karohano le likarolo tsa karoloana ea karoloana e fanoeng bakeng sa ho buuoa
Tse latelang ke papiso ea likaroloana tse tobileng
| Lebitso / Sekhahla sa Karolo (μM) | Lebitso / Sekhahla sa Karolo (μM) | Lebitso / Karolo ea Sepheo (μM) |
| Virus.003-0.0 | Aeronol 0.03-1 | Aerosolsized microdroplet 1-12 |
| 0.01-0.1 | Paint 0.1-6 | Fokotsa Ash 1-200 |
| Carbon Black 0.01-0.3 | Memo ea lebese 0,1-10 | Likokoanyana tse 5-10 |
| Resin 0.01-1 | Baktheria 0.3-30 | Samente e lerole 5-100 |
| Mosi oa koae 0,01-1 | Lehala la Sand 0,5-5 | Poll 10-15 |
| Silicone 0,02-0.1 | Pelescide 0.5-10 | Moriri oa motho 50-120 |
| Sello sa Trystallize- 0.03-0.5 | E hlophisitsoe ka lerōle la silafatsa 1-11 | Lehlatsoana Sand 100-1200 |
Nako ea poso: Jun-14-2022