Theknoloji ea liphaephe tsa khase e hloekileng haholo ke karolo ea bohlokoa ea tsamaiso ea phepelo ea khase e hloekileng haholo, e leng theknoloji ea bohlokoa ea ho fana ka khase e hlokahalang e hloekileng ho fihlela e sebelisoa 'me e ntse e boloka boleng bo tšoanelehang;Theknoloji ea liphaephe tsa khase e hloekileng e kenyelletsa moralo o nepahetseng oa sistimi, khetho ea lisebelisoa le lisebelisoa, kaho le ho kenya, le liteko.Lilemong tsa morao tjena, litlhoko tse ntseng li eketseha tsa ho hloeka le ho se hloeke ha likhase tse phahameng tsa bohloeki ha ho etsoa lihlahisoa tsa microelectronics tse emeloang ke lipotoloho tse kholo tse kopantsoeng li entse hore theknoloji ea liphaephe ea likhase tse phahameng tsa bohloeki li amehe ka ho eketsehileng le ho hatisoa.Se latelang ke tlhaloso e khutšoanyane ea liphaephe tsa khase tse hloekileng tse tsoang ho khetho ea thepaof kaho, hammoho le kamohelo le tsamaiso ea letsatsi le letsatsi.
Mefuta ea likhase tse tloaelehileng
Sehlopha sa likhase tse tloaelehileng indastering ea lisebelisoa tsa elektroniki:
Likhase tse tloaelehileng（Khase e ngata）: haedrojene (H2)naetrojene (N2), oksijene (O2), argon (A2), joalo-joalo.
Likhase tse khethehilengke SiH4 ,PH3 ,B2H6 ,A8H3 ,CL ,HCL,CF4 ,NH3,POCL3, SIH2CL2 SIHCL3,NH3, BCL3 ,SIF4 ,CLF3 ,CO,C2F6, N2O,F2,HF,HBR SF6…… joalo-joalo.
Mefuta ea likhase tse khethehileng ka kakaretso e ka hlalosoa e le e senyangkhase, chefokhase, e ka changkhase, e changkhase, inetsekhase, joalo-joalo Likhase tse sebelisoang ka tloaelo tsa semiconductor hangata li aroloa ka tsela e latelang.
(i) E senyang / e chefokhase: HCl , BF3, WF6, HBr , SiH2Cl2, NH3, PH3, Cl2, BCl3… joalo-joalo.
(ii) Ho chesakhase: H2, CH4, SiH4, PH3, ASH3, SiH2Cl2, B2H6, CH2F2,CH3F, CO… joalo-joalo.
(iii) ho chakhase:O2, Cl2, N2O, NF3… joalo-joalo.
(iv) Boiketlokhase: N2, CF4, C2F6, C4F8,SF6, CO2, Ne, Kr, He... etc.
Likhase tse ngata tsa semiconductor li kotsi 'meleng oa motho.Haholo-holo, tse ling tsa likhase tsena, tse kang SiH4 ho chesa ka tšohanyetso, hafeela ho lutla ho tla itšoara ka matla ka oksijene moeeng 'me ho qala ho chesa;le ASH3e chefo haholo, ho lutla hanyenyane ho ka baka kotsi ea bophelo ba motho, ke ka lebaka la likotsi tsena tse hlakileng, kahoo litlhoko tsa polokeho ea moralo oa sistimi li phahame haholo.
Sebaka sa tšebeliso ea likhase
E le thepa ea bohlokoa ea motheo ea indasteri ea morao-rao, lihlahisoa tsa khase li sebelisoa haholo, 'me palo e kholo ea likhase tse tloaelehileng kapa likhase tse khethehileng li sebelisoa metallurgy, tšepe, peterole, indasteri ea lik'hemik'hale, mechine, lisebelisoa tsa elektronike, khalase, ceramics, thepa ea mohaho, kaho. , mafapha a ho lokisa lijo, meriana le bongaka.Tšebeliso ea khase e na le phello ea bohlokoa ho thekenoloji e phahameng ea masimo ana haholo-holo, 'me ke khase ea eona ea bohlokoa kapa khase ea ts'ebetso.Ke feela ka litlhoko le khothatso ea mafapha a fapaneng a macha a indasteri le mahlale a morao-rao le thekenoloji, lihlahisoa tsa indasteri ea khase li ka ntlafatsoa ka sekhahla le meeli ho latela mefuta, boleng le bongata.
Ts'ebeliso ea khase indastering ea microelectronics le semiconductor
Tšebeliso ea khase e 'nile ea e-ba le karolo ea bohlokoa ts'ebetsong ea semiconductor, haholo-holo ts'ebetso ea semiconductor e' nile ea sebelisoa haholo liindastering tse sa tšoaneng, ho tloha ULSI ea setso, TFT-LCD ho ea indastering ea hona joale ea micro-electro-mechanical (MEMS), kaofela ha eona. tse sebelisang se bitsoang semiconductor process joalo ka tlhahiso ea lihlahisoa.Ho hloeka ha khase ho na le phello e tiileng ts'ebetsong ea likarolo le lihlahisoa tsa lihlahisoa, 'me polokeho ea phepelo ea khase e amana le bophelo bo botle ba basebetsi le polokeho ea ts'ebetso ea limela.
Bohlokoa ba liphaephe tse hloekileng haholo lipalangoang tsa khase tse hloekileng
Ts'ebetsong ea ho qhibiliha ha tšepe e sa hloekang le ho etsa lintho tse bonahalang, hoo e ka bang 200g ea khase e ka monngoa ka tonne.Ka mor'a ho sebetsana le tšepe e sa hloekang, e seng feela holim'a eona e khomarelang le litšila tse fapa-fapaneng, empa hape le ka har'a tšepe ea eona ea tšepe e ile ea boela ea amohela tekanyo e itseng ea khase.Ha moea o phalla ka phaephe, tšepe e monyang karolo ena ea khase e tla boela e kene moeeng, e silafatse khase e hloekileng.Ha phallo ea moea e ka har'a tube e ntse e tsoela pele, phaephe e kenya khase tlas'a khatello, 'me ha phallo ea moea e emisa ho feta, khase e adsorbed ke tube e etsa phokotso ea khatello ho rarolla,' me khase e rarollotsoeng le eona e kena ka har'a khase e hloekileng ka har'a tube. joalo ka litšila.Ka nako e ts'oanang, adsorption le tharollo li phetoa, e le hore tšepe e karolong e ka hare ea tube e boetse e hlahisa palo e itseng ea phofo, 'me likaroloana tsena tsa lerōle tsa tšepe li silafatsa khase e hloekileng ka har'a tube.Tšobotsi ena ea tube ke ea bohlokoa ho netefatsa bohloeki ba khase e tsamaisoang, e sa hlokeng feela boreleli bo phahameng haholo ba bokahare ba ka hare ba tube, empa hape le ho hanyetsa ho apara ho phahameng.
Ha ho sebelisoa khase e matla e senyang, ho lokela ho sebelisoe liphaephe tsa tšepe tse sa jeng tse thibelang ho bola.Ho seng joalo, phala e tla hlahisa matheba a kutu ka holim'a bokahare bo ka hare ka lebaka la ho senyeha, 'me maemong a tebileng, ho tla ba le sebaka se seholo sa tšepe ea tšepe kapa esita le ho phunyeha, e tla silafatsa khase e hloekileng e lokelang ho ajoa.
Khokahano ea liphaephe tsa phetisetso ea khase ea bohloeki bo phahameng le bohloeki bo phahameng le kabo ea litefiso tse kholo tsa phallo.
Ha e le hantle, kaofela ha tsona li cheselitsoe, 'me li-tubes tse sebelisoang li hlokeha hore li se ke tsa fetoha mokhatlong ha ho sebelisoa welding.Lisebelisoa tse nang le k'habone e phahameng haholo li tlas'a ho kenella ha moea oa likarolo tse cheselitsoeng ha li cheselletsa, e leng se etsang hore ho kenelle ha likhase ka hare le ka ntle ho phala le ho senya bohloeki, ho omella le bohloeki ba khase e fetisoang, e leng se fellang ka tahlehelo ea boiteko bohle ba rona.
Ka kakaretso, bakeng sa khase e hloekileng le phaephe e khethehileng ea phetisetso ea khase, ho hlokahala hore ho sebelisoe phekolo e khethehileng ea phala ea tšepe e hloekileng e phahameng, ho etsa tsamaiso ea liphaephe tse hloekileng (ho kenyeletsoa liphaephe, lisebelisoa, li-valve, VMB, VMP). kabo ea khase e hloekileng haholo e na le mosebetsi oa bohlokoa.
Khopolo e akaretsang ea theknoloji e hloekileng bakeng sa lipeipi tsa phetiso le kabo
Phetiso ea 'mele ea khase e hloekileng haholo le e hloekileng ka liphaephe e bolela hore ho na le litlhoko tse itseng kapa taolo ea likarolo tse tharo tsa khase e lokelang ho tsamaisoa.
Ho hloeka ha khase: Likahare tsa sepakapaka se sa hloekang moeeng oa gGas: Likahare tsa sepakapaka se sa hloekang ka har'a khase, hangata li hlahisoa e le peresente ea tlhoeko ea khase, joalo ka 99.9999%, hape e hlahisoa e le tekanyo ea bophahamo ba moea o sa hloekang ppm, ppb, ppt.
Dryness/ Ketso ya ho omella: palo ya lerotholi la monola ka hara kgase, kapa bokaalo bo bitswang ho koloba, hangata bo hlahiswang ho ya ka phoka, joalo ka kgatello ya sepakapaka ya phoka -70.C.
Bohloeki: palo ea likaroloana tse silafatsang tse teng ka har'a khase, boholo ba karoloana ea µm, hore na ho hlahisoa likaroloana tse kae/M3 bakeng sa moea o hatelitsoeng, hangata le tsona li hlahisoang ho latela hore na masala a tiileng a ke keng a qojoa, a koahelang bokahare ba oli. .
Karohano ea boholo ba litšila: likaroloana tse silafatsang, haholo-holo li bua ka ho hloekisoa ha liphaephe, ho roala, kutu e hlahisoang ke likaroloana tsa tšepe, likaroloana tsa soot ea sepakapaka, hammoho le likokoana-hloko, phages le marotholi a khase a nang le mongobo, joalo-joalo, ho latela boholo ba karoloana ea eona. e arotsoe ka
a) Likaroloana tse kholo - boholo ba karolo e ka holimo ho 5μm
b) Karolo - thepa bophara pakeng tsa 0.1μm-5μm
c) Likaroloana tsa Ultra-micro - boholo ba likaroloana tse ka tlase ho 0.1μm.
Bakeng sa ho ntlafatsa ts'ebeliso ea thekenoloji ena, ho khona ho utloisisa kutloisiso ea boholo ba likaroloana le likarolo tsa μm, ho fanoe ka sete sa boemo bo itseng ba likaroloana bakeng sa litšupiso.
Se latelang ke papiso ea likaroloana tse itseng
| Lebitso / boholo ba karolo (µm) | Lebitso / boholo ba karolo (µm) | Lebitso/ Boholo ba karolo (µm) |
| Kokoana-hloko 0.003-0.0 | Aerosol 0.03-1 | Aerosolized microdroplet 1-12 |
| Mafura a nyutlelie 0.01-0.1 | Pente 0.1-6 | Fofa molora 1-200 |
| Khabone e ntšo 0.01-0.3 | Phofo ea lebese 0.1-10 | Chefo e bolaeang likokoanyana 5-10 |
| Resin 0.01-1 | Libaktheria 0.3-30 | Lerōle la samente 5-100 |
| Mosi oa koae 0.01-1 | Lerōle la lehlabathe 0.5-5 | Peo e phofshoana ea 10-15 |
| Silicone 0.02-0.1 | Chefo e bolaeang likokoanyana 0.5-10 | Moriri oa motho 50-120 |
| Letsoai la kristale 0.03-0.5 | Lerōle le lengata la sebabole 1-11 | Lehlabathe la leoatle 100-1200 |
Nako ea poso: Jun-14-2022